Air Pollution Control

TSMC's air pollution control design adopts a "source classification and multi-stage processing" approach by using the best available technology through high-performance equipment to reduce environmental impact. We use backup system and dual-track management to ensure normal operation of control equipment and prevent abnormal events.

Strategies, Targets & Achievements

Strategies
  • Best Available Technology (BAT)
    Using BAT to deal with operational pollution and reduce its environmental impact
  • Zero Failure of Control Equipment
    Use backup systems and dual-track management to ensure normal operation of control equipment and prevent abnormal events
2017
2018
2020

Air Pollution Control Process

TSMC adds high-efficiency pollution control facilities for different process gases. Exhaust gas from the tools is treated at the first stage for source processing, reduction rate is over 95%, and then the gas is sent for the second stage of terminal processing. After two-stage treatment, the total reduction rate can reach as high as 99% or more.

Air Pollution Control Measures Exceed Regulatory Requirements

Air Pollution Control Measures Exceed Regulatory Requirements

Gas Classification Regulatory Standards TSMC Practices
Acid Exhaust System (SEX)
  • The pH value of the wash tank should be > 7.
  • The wetting factor should be > 0.1 m2/hr.
  • The retention time of the packing section should be > 0.5 seconds and the specific surface area of the packing should be > 90 m2/m3.
  • The pH value of the wash tank is set at 8~11.
  • The wetting factor is > 0.155 m2/hr.
  • The retention time of the packing section is > 0.73 seconds and the specific surface area of the packing is > 128 m2/m3.
Alkaline Exhaust System (AEX)
  • The pH value of the wash tank should be < 7.
  • The wetting factor should be > 0.1 m2/hr.
  • The retention time of the packing section should be > 0.5 seconds and the specific surface area of the packing should be > 90 m2/m3.
  • The pH value of the wash tank is set at 2~6.
  • The wetting factor is > 0.155 m2/hr.
  • The retention time of the packing section should be > 0.5 seconds and the specific surface area of the packing should be > 90 m2/m3.
Volatile Organic Exhaust System (VEX)
  • Emission reduction rate of central scrubber should be over 90%.
  • Emission reduction rate of central scrubber is over 95%.
TSMC's air pollution control complies with local regulatory standards of Taiwan and overseas subsidiaries. All equipment is provided with at least one set of backup system. TSMC has also established automatic monitoring systems to grasp the effectiveness of the exhaust gas treatment at all times. In 2017, the average removal rate of volatile organic waste gas was 96.4%.

For more information, please read TSMC 2017 Corporate Responsibility Report:

Green Manufacturing - Air Pollution Control

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