Steve Tso received the B.S. degree in Physics from National Taiwan University in 1973. He received the M.S. and Ph.D degrees in Materials Science and Engineering from University of California, Berkeley in 1976 and 1979 respectively.

He worked in Texas Instruments from 1979 to 1989 as a Fab Engineering Manager. From 1989 to 1994 he was a Fab Manager and later the Vice President of Fab Operations in SGS-Thomson. He joined Applied Materials in 1994 as a General Manager of Metal CVD Products.

Steve joined TSMC at the end of 1996 as the R&D Vice President. He was later the Senior Vice President of World Wide Marketing & Sales, and Operations before becoming the President of Wafertech in Camas, Washington from 2000 through 2004.

He was repatriated to take over the CIO position at TSMC in 2005.