TSMC utilizes zeolite rotor concentrators and combustion furnaces to significantly reduce emission of VOCs, and successfully improve the reduction rate of Volatile Organic Gases to 97%.
TSMC utilizes zeolite rotor concentrators and combustion furnaces to significantly reduce emission of VOCs, and successfully improve the reduction rate of Volatile Organic Gases to 97%.
CASE STUDY

Utilizing Zeolite Rotor Concentrators to Introduce Clean Air for Desorption and Reduce Concentration of Volatile Organic Waste Gas Emission by 23%

Shih-Min Chao
Li-Hsing Chien

In order to fulfill its mission on green manufacturing, TSMC has devoted to reduce air pollution. TSMC utilizes zeolite rotor concentrators and combustion furnaces to deal with the emission of volatile organic wastes (VOCs), and the removal rate is steady at 95~97%, far better than 90% required by the "Air Pollution Control and Emissions Standards for the Semiconductor Industry."

To promote environmental sustainability, TSMC continuously develops new technology to improve the results of air pollution prevention and control. TSMC Fab 12A in Hsinchu adopted the technology of "clean-gas-desorbing zeolite rotor concentrators" to refine the existing VOC emission prevention facilities, and the Company's concentration of volatile organic gas emissions decreased considerably by 23% and increased reduction rates by 0.7%. The technology effectively reduced volatile organic gas emission and lowered total emissions of VOCs to below that of 2017, instead of increasing with the growth of production capacity in new fabs.

Improvement in Concentrations and Emission of Volatile Organic Gases

Improvement of Zeolite Rotor Concentrator

The technology comes from the first air pollution treatment project of Fab 12A in the Hsinchu Science Park in 2017. It replaces with clean air treated in the absorption zone as the air source that supplies the cooling zone, increasing the efficiency of desorption and effectively decreasing the concentration of VOC emission.

This innovative technology is extending from Fab 12A to other fabs in 2019. The phase four and phase five introduction projects at Fab 12B were completed, and all facilities in TSMC Fab 12B are expected to adopt this technology in the fourth quarter of this year. TSMC Fab 14 and Fab 15 are expected to be refitted by 2020.

Rollout Schedule of Zeolite Rotor Concentrators