TSMC has always insisted on building a strong, in-house R&D capability. As a global semiconductor technology leader, TSMC provides the most advanced and comprehensive portfolio of dedicated foundry process technologies.

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3nm Technology
In 2022, TSMC led the foundry to start 3nm FinFET (N3) technology high volume production. TSMC’s 3nm process is the industry’s most advanced semiconductor technology...
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5nm Technology
TSMC's 5nm Fin Field-Effect Transistor (FinFET) process technology is optimized for both mobile and high performance...
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7nm Technology
TSMC's 7nm Fin Field-Effect Transistor (FinFET) process technology provides the industry's most competitive logic density...
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10nm Technology
TSMC's 10nm Fin Field-Effect Transistor (FinFET) process provides the most competitive combination of performance, power, area...
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16/12nm Technology
In November 2013, TSMC became the first foundry to begin 16nm Fin Field Effect Transistor (FinFET) risk production...
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20nm Technology
TSMC became the world's first semiconductor company that begins 20nm volume production, using its innovative double patterning...
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22nm Technology
22nm ultra-low power (22ULP) technology was developed based on TSMC's industry-leading 28nm technology and completed all process...
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28nm Technology
TSMC became the first foundry to provide the world's first 28nm General Purpose process technology in 2011 and has been adding...
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40nm Technology
TSMC became the first foundry to mass produce a variety of products for multiple customers using its 40nm process...
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65nm Technology
TSMC became the first foundry to begin 65nm risk production in 2005 and passed product certification the following year...
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90nm Technology
TSMC became the first semiconductor company to produce fully-functional 90nm chips using immersion lithography...
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0.13-micron Technology
TSMC launched the semiconductor industry's first 0.13-micron (µm) low-k, copper system-on-a-chip (SoC) process technology...
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0.18-micron Technology
TSMC offered the world's first 0.18-micron (µm) low power process technology in 1998. The Company continued to build...
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3-micron Technology
TSMC has persistently maintained a “building in-house R&D” strategy since its founding in 1987, which has given the company...