Capacitive and Piezoelectric solutions

TSMC's capacitive MEMS architecture has proliferated from motion sensors to pressure sensors. The CMOS+MEMS monolithic pressure sensor offers significantly higher sensitivity in altitude change.

TSMC's capacitive MEMS microphone offers significantly higher sensitivity in altitude change

Talking is the most natural form of communication for human. Voice AI enables us to interact with machines in an innately human way. Under the hood, advanced MEMS based microPhones are an important contributor to enabling that voice-based user experience.

TSMC offers both capacitive and Piezoelectric microPhone solutions which provide ultra-low power and particle-immune solutions.

Piezoelectric u-Phone provides ultra-low power and particle-immune solutions.

By combining special substrate and special materials like Piezo, we will be able to support more product needs like ultrasound transceivers, MEMS speaker, and a variety of bio-medical products.

support more product needs like ultrasound transceivers, microphone, MEMS speaker, and a variety of bio-medical products
Featured Technologies
ULL/ULP

Comprehensive ultra-low power technology platform...

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NVM

Logic compatible and low cost NVM solutions...

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CIS

World-class density and performance...

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MEMS

Capacitive and Piezoelectric u-Phone solutions...

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RF

5G connectivity...


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