TSMC's capacitive MEMS architecture has expanded from motion sensors to pressure sensors. The CMOS+MEMS monolithic pressure sensor offers significantly higher sensitivity to altitude change.

Voice artificial intelligence (AI) machine interaction is highly intuitive. Under the hood, advanced MEMS-based microphones enhance the voice-activated user experience.

TSMC offers capacitive and Piezoelectric microphones that feature ultra-low power and particle-immune solutions.

By combining special substrate and special materials, like Piezo, TSMC supports many applications including ultrasound transceivers, MEMS speaker, and a variety of bio-medical products.